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MASTER NANOTECH
Master's Degree in Micro and Nano Technologies for Integrated Systems
MASTER NANOTECH
MASTER NANOTECH

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Microsystems basics II

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  • Number of hours

    • Lectures : 20h
    ECTS : 2
  • Officials : Matteo COCUZZA (Polito)

Goals

To provide some examples of microsystems, microsensors and microactuators for the measurement of different physics phenomena.

Content

Courses

  • Pressure sensors: principles, piezoresistive, capacitive and resonant structures, center-boss applications, high temperature applications and solutions (SOI, SiC), medical pressure sensors
  • Accelerometers: principles, piezoelectric, piezoresistive, capacitive, resonating, tunneling and closed loop structures, commercial devices
  • Acoustic sensors: principles, APM, SAW, Love-wave, FPW, TSM structures, applications for the measurement of temperature, force, acceleration, torque, humidity, dew point, flow, electronic nose, measurement methods, wireless configurations, examples of fluidic actuators
  • Flow sensors: principles, hot wire, anemometric and time of flight configurations, commercial and prototype examples, lift-force and ISFET configurations
  • Microfluidics: the problem of scaling, advantages and drawbacks, materials, microchannels, micromixers, microneedles, microfilters, microvalves (active, passive and fixed), micropumps (with and without moving parts)
  • Chemical sensors: gas sensors (semiconductive metal oxides and FET structures), microhotplate structures, problem of sensitivity, selectivity and drift, H2 sensing, ISFET
  • Biochemical sensors: materials and transduction principles (potentiometric, amperometric, thermal, optical and gravimetric), biorecognition processes, immobilization processes, ISFET, ENFET, IMFET, the problem of packaging
  • Microsystems for biomedical applications: principles, diagnostic systems, drug delivery, tissue engineering, minimally invasive therapy and surgery devices
  • Microdevices for genetic diagnostics: the DNA, PCR, fluorescence techniques, restriction digestion, electrophoretic separation, hybridization, the problem of scaling, microdevices for PCR, separation and hybridization, integrated microchips for DNA analysis
  • MEMS for power generation: fuel cells, different types, applications of PEMFC and micro-DMFC, examples of micro-DMFC
  • Optical microdevices: the DLP technology, the DMD structure and applications


Exercises and Laboratories

 None

Tests

Marking mode : written (1h)

Additional Information

Teaching type
lecture

Related courses
Necessary conditions : none
Preparation for : none

Bibliography

Sze, S.M. Semiconductor sensors / ed. S.M. Sze. - New York : Wiley, copyr. 1994

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Date of update September 10, 2019

French
Master Nanotech
Grenoble INP
Minatec - 3 Parvis Louis Néel - CS 50257 - 38016 Grenoble Cedex 1
Tél : +33 (0)4 56 52 91 00
 
 
  République Française
Université Grenoble Alpes