This course will be focused on the physics of short channel MOSFET transistor. The aim of these lectures is to give an overview of the challenges raised by scaling in the nanometer range.
Threshold voltage roll off Saturation velocity Quantum effects : confinement and tunnelingBallistic limitMOSFET scaling constant field and constant voltage scalingIntroduction to Roadmap 2002
Exercises and Laboratories
Fundamentals of Modern VLSI devices, by Y. Taur, T. H. Ning, Cambridge university press 1999
Date of update September 10, 2019