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MASTER NANOTECH
Master's Degree in Micro and Nano Technologies for Integrated Systems
MASTER NANOTECH
MASTER NANOTECH
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Layout - Nanotech Labs

Updated on July 20, 2009
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To visualize the mask that you will use during the MEMS labworks, you have to:
  • run the software with the MEMS layout, by following the procedure:
    • in the "File" menu, select "open work library"
    • select the file named :"mems2003.dbx"
    • in the "Group" menu, select "edit group"
    • select the group "WAFER4P_15100

[legende-image]1242722803394[/legende-image]zoom in

ruler

change the color/filling of the different layer


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Date of update July 20, 2009

Grenoble INP Institut d'ingénierie Univ. Grenoble Alpes