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MASTER NANOTECH
Master's Degree in Micro and Nano Technologies for Integrated Systems
MASTER NANOTECH
MASTER NANOTECH

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Microsystems Design

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  • Number of hours

    • Lectures : 14h
    • Tutorials : 6h
    ECTS : 1,5
  • Officials : Libor RUFER

Goals

The course will give basic principles of micro-electromechanical systems modelling. Starting from microsystem simple mechanical elements, the course will develop the modelling of more complex structures including electromechanical transducers. Approaches to reduced-order modelling of complex microstructures will be explained and the electromechanical and electroacoustic analogies will be studied in detail. Basic electromechanical transduction mechanisms will be described; their analogy models will be developed and applied to examples of real microsystems. Among the transduction mechanisms will be both reciprocal principles as electrostatic, piezoelectric, electromagnetic and electrodynamic, and non-reciprocal principles as piezoresistive and thermomechanical. Starting from microsystem basics, the course will give some principles of CAD of microsystem simulation and realated tools.

Content

Courses

  1. Introduction
  2.  Continuous mechanical systems - static behavior
  3. Continuous mechanical systems - dynamic behavior
  4. Discrete systems: electro-mechanical & electro-acoustic analogies
  5. Acoustic elements - air damping
  6.  Electro-mechanical transducers modeling: electrostatic transduction
  7. Piezoelectric transduction
  8. Electromechanical transduction with magnetic field
  9. Non-reciprocal transducers - Piezoresistive transduction
Exercises and Laboratories
Numerical exercises on the course topics

Tests

2 hours exam

Additional Information

Bibliography

  • TIMOSHENKO, S. P., GOODIER, J. N., Theory of Elasticity, Mc Graw-Hill, 1970.
  • GERE, J.M., Mechanics of Materials, Brooks/Cole, Thomson Learning, 2001, 926 pp.
  • SENTURIA, S. D., Microsystem Design, Kluwer Academic Publishers, 2001, 689 pp.
  • BAO, M. H., Micro Mechanical Transducers, Elsevier, 2000, 378 pp.

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Date of update September 10, 2019

Université Grenoble Alpes