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MASTER NANOTECH
Master's Degree in Micro and Nano Technologies for Integrated Systems
MASTER NANOTECH
MASTER NANOTECH

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Next generation lithography

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Content

Courses

This course will give an overview of the different up to date lithography technologies used in research and industrial applications:
- optical lithography (introduction, immersion lithography, masks, illuminations, optical proximity effects...)
- electron beam lithography (electron-solid interaction, electron optics, proximity effects...)
- nano imprint lithography (polymers properties, process issues...)
- resist processes (positive and negative resists, chemistry, full process...)


Exercises and laboratories

None

Tests

Marking mode : written

Additional Information

Teaching type
lecture

Related courses
Necessary conditions : none
Preparation for : none

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Date of update September 10, 2019

Université Grenoble Alpes