Understand the impact of magnetic interactions on MEMS: high energy density & force density, levitation, large throw...
Explore what magnetic MEMS made of: µ-magnets, µ-coils, active materials...
Discover many applications and prototypes: µ-switch, µ-motor, µ-generator, µ-scanner, µ-sensor
Courses
None
Related courses
Necessary conditions : Basic knowledge of the elementary steps of MEMS fabrication (films, photolithography, Si machining)
Preparation for : none
Poly complet illustré
mise à jour le 23 janvier 2019
Grenoble INP
Nos sites
eServices
