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Microsystèmes II

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  • Volumes horaires

    • CM : 20h
    Crédits ECTS : 2
  • Responsables : Matteo COCUZZA (Polito)


To provide some examples of microsystems, microsensors and microactuators for the measurement of different physics phenomena.



  • Pressure sensors: principles, piezoresistive, capacitive and resonant structures, center-boss applications, high temperature applications and solutions (SOI, SiC), medical pressure sensors
  • Accelerometers: principles, piezoelectric, piezoresistive, capacitive, resonating, tunneling and closed loop structures, commercial devices
  • Acoustic sensors: principles, APM, SAW, Love-wave, FPW, TSM structures, applications for the measurement of temperature, force, acceleration, torque, humidity, dew point, flow, electronic nose, measurement methods, wireless configurations, examples of fluidic actuators
  • Flow sensors: principles, hot wire, anemometric and time of flight configurations, commercial and prototype examples, lift-force and ISFET configurations
  • Microfluidics: the problem of scaling, advantages and drawbacks, materials, microchannels, micromixers, microneedles, microfilters, microvalves (active, passive and fixed), micropumps (with and without moving parts)
  • Chemical sensors: gas sensors (semiconductive metal oxides and FET structures), microhotplate structures, problem of sensitivity, selectivity and drift, H2 sensing, ISFET
  • Biochemical sensors: materials and transduction principles (potentiometric, amperometric, thermal, optical and gravimetric), biorecognition processes, immobilization processes, ISFET, ENFET, IMFET, the problem of packaging
  • Microsystems for biomedical applications: principles, diagnostic systems, drug delivery, tissue engineering, minimally invasive therapy and surgery devices
  • Microdevices for genetic diagnostics: the DNA, PCR, fluorescence techniques, restriction digestion, electrophoretic separation, hybridization, the problem of scaling, microdevices for PCR, separation and hybridization, integrated microchips for DNA analysis
  • MEMS for power generation: fuel cells, different types, applications of PEMFC and micro-DMFC, examples of micro-DMFC
  • Optical microdevices: the DLP technology, the DMD structure and applications

Exercises and Laboratories


Contrôles des connaissances

Marking mode : written (1h)

Informations complémentaires

Teaching type

Related courses
Necessary conditions : none
Preparation for : none


Sze, S.M. Semiconductor sensors / ed. S.M. Sze. - New York : Wiley, copyr. 1994

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mise à jour le 23 janvier 2019

Université Grenoble Alpes