Next generation lithography

Courses

This course will give an overview of the different up to date lithography technologies used in research and industrial applications:
- optical lithography (introduction, immersion lithography, masks, illuminations, optical proximity effects...)
- electron beam lithography (electron-solid interaction, electron optics, proximity effects...)
- nano imprint lithography (polymers properties, process issues...)
- resist processes (positive and negative resists, chemistry, full process...)


Exercises and laboratories

None

Marking mode : written

Teaching type
lecture

Related courses
Necessary conditions : none
Preparation for : none