Microsystems Design
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Number of hours
- Lectures : 14h
- Tutorials : 6h
ECTS : 1,5
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Goals
The course will give basic principles of micro-electromechanical systems modelling. Starting from microsystem simple mechanical elements, the course will develop the modelling of more complex structures including electromechanical transducers. Approaches to reduced-order modelling of complex microstructures will be explained and the electromechanical and electroacoustic analogies will be studied in detail. Basic electromechanical transduction mechanisms will be described; their analogy models will be developed and applied to examples of real microsystems. Among the transduction mechanisms will be both reciprocal principles as electrostatic, piezoelectric, electromagnetic and electrodynamic, and non-reciprocal principles as piezoresistive and thermomechanical. Starting from microsystem basics, the course will give some principles of CAD of microsystem simulation and realated tools.
Content Courses
- Introduction
- Continuous mechanical systems - static behavior
- Continuous mechanical systems - dynamic behavior
- Discrete systems: electro-mechanical & electro-acoustic analogies
- Acoustic elements - air damping
- Electro-mechanical transducers modeling: electrostatic transduction
- Piezoelectric transduction
- Electromechanical transduction with magnetic field
- Non-reciprocal transducers - Piezoresistive transduction
Exercises and LaboratoriesNumerical exercises on the course topics
Bibliography - TIMOSHENKO, S. P., GOODIER, J. N., Theory of Elasticity, Mc Graw-Hill, 1970.
- GERE, J.M., Mechanics of Materials, Brooks/Cole, Thomson Learning, 2001, 926 pp.
- SENTURIA, S. D., Microsystem Design, Kluwer Academic Publishers, 2001, 689 pp.
- BAO, M. H., Micro Mechanical Transducers, Elsevier, 2000, 378 pp.
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Date of update September 10, 2019
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