From micro to nanoelectronics
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Goals
This course will be focused on the physics of short channel MOSFET transistor. The aim of these lectures is to give an overview of the challenges raised by scaling in the nanometer range.
Content Courses
- Basics of long channel MOS Transistor
- Short channel MOSFET : mobility degradation due to surface roughness
Threshold voltage roll off
Saturation velocity
Quantum effects : confinement and tunneling
Ballistic limit
MOSFET scaling constant field and constant voltage scaling
Introduction to Roadmap 2002
Exercises and Laboratories
None
Additional Information Related courses
Necessary conditions : Physique des semiconducteurs - Capacité MOS - Transistor MOS à canal long
Preparation for :
Nano-electronics
Bibliography Fundamentals of Modern VLSI devices, by Y. Taur, T. H. Ning, Cambridge university press 1999
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Date of update September 10, 2019