Magnetic microsystems applications
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Goals
Understand the impact of magnetic interactions on MEMS: high energy density & force density, levitation, large throw...
Explore what magnetic MEMS made of: µ-magnets, µ-coils, active materials...
Discover many applications and prototypes: µ-switch, µ-motor, µ-generator, µ-scanner, µ-sensor
Content Courses
- introduction to magnetic interactions
- scale reduction laws are favorable
- µ-magnets: materials, technologies
- µ-coils: geometries, integration
- active materials: magnetostriction, magnetic shape memory, hybrids
- extreme current densities are possible
- examples of prototypes: ...
Exercises and Laboratories None
Additional Information Related courses
Necessary conditions : Basic knowledge of the elementary steps of MEMS fabrication (films, photolithography, Si machining)
Preparation for : none
Bibliography Poly complet illustré
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Date of update September 10, 2019